Titanium Sublimation Pumps (TSPs) are often used in combination with ion pumps or independently to remove reactive gases from the vacuum environment. Combined with an ion pump, the TSP allows for low ultimate pressures in a shorter amount of time. All TSP components are bakeable to 400 C.

TSPs operate by heating a titanium filament and subliming (converting from solid to gas phase) titanium molecules onto a surface. Sublimed titanium layers are then available to chemically react with reactive gases, like oxygen and nitrogen, and disassociate and diffuse hydrogen. TSPs can operate from 10-5 to 10-12 mbar and have pumping speeds in excess of 10,000 l/s for hydrogen.